 |
Fig. A (left) The experimental setup of a 6DOF combined micro/nano-positioners, and (right) subcomponents at Smart Structures and NEMS Laboratory. |
Clemson University Smart Structures and NEMS Laboratory is equipped with a number of state-of-the-art instruments providing a wide range of capability in dynamic modeling, vibration analysis and real-time control implementations for nanoscale/microscale to macroscale engineering systems. More specifically, this laboratory is equipped with an open architecture Chemical Vapor Deposition-based nanotube processing test chamber, micro- and nano-positioning characterization test stations and a variety of hardware-in-the-loop setups to facilitate the real-time control implementation, sensing and actuation of variety of MESM and NEMS. Our research team enjoys from several state-of-the-art sub-nanometer PZT-driven positioners (see Figure A).
|
Fig. A (left) The experimental setup of a 6DOF combined micro/nano-positioners, and (right) subcomponents at Smart Structures and NEMS Laboratory. |
The laboratory is also equipped with a state-of-the-art piezoelectrically-driven micromanipulator for nano-objects and nanofiber grasping and manipulation applications (see Figure B), and several Active Probes® (piezoelectrically-driven microcantilevers) for biological mass detection and sensing.
|
||||
Fig. B (top-left) MM3A micromanipulator with force sensor module, (top-right) MM3A micromanipulator control module, (bottom-left) MM3A micromanipulator under MSA-400 for object manipulation with digital image feedback , and (bottom-right) close-up of MM3A micromanipulator under MSA-400; all at SSNEMS Laboratory. |
Our laboratory is also home to a state-of-the-art microsystem analyzer, the MSA-400 from Polytec, through an NSF Major Research Instrument (MRI) grant, see Figure C1 and C2. Such arrangements facilitate the development of comprehensive modeling, vibration analysis and control implementation for variety of MEMS and NEMS.
 |
Figure C1: Polytec MSA-400 experimental setup |
|
|||
|
|||
| Figure C2: Several configurations of MEMS and NEMS dynamic modeling and control applications (from top-left to bottom-right: piezoresistive-based nanomechanical cantilever force sensors, piezoelectrically-actuated nanomechanical cantilever sensors, laser-less AFM setup with piezoresistive-based cantilever, images of a sample taken by our laser-less AFM setup including Clemson University Tiger Paw; all at Clemson University SSNEMS Laboratory. |
Our laboratory is also home to the following general facilities: signal interface boxes and several Quanser MultiQ D/A boards, laser displacement transducers, signal conditioners, oscilloscopes, multimeters, function generators, scaling amplifiers, DC-regulated powers supplies, Techron linear amplifiers, a number of hardware-in-the-loop test settings, simulation platforms (MATLAB/SIMULINK), a number of piezo-sensors and actuators, as well as a number of common instruments such as oscilloscopes, voltage standards and other basic devices.
